Application of particle sensor in clean room

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Clean rooms, also known as clean rooms or static rooms, are rooms with air filtration, distribution, optimization, building materials, and devices, and are the basis for controlling pollution and cross contamination. Use specific standard operating procedures to control the concentration of particulate matter and bacteria in the air to achieve appropriate levels of cleanliness. The main function of a clean room is to control materials. The air in contact with the product includes temperature and humidity, enabling good production and storage space for the product.
The development of clean rooms is closely related to modern industry and cutting-edge technology. Due to the environmental requirements of the precision machinery industry (such as gyroscope and micro bearing processing) and the semiconductor industry (such as large-scale integrated circuit production), the development of clean room technology has been promoted. According to domestic statistics, the qualification rate of MOS circuit cores produced in environments without cleanliness requirements is only 10% to 15%, and that of 64 bit memory is only 2%. Currently, clean rooms are widely used in industries such as precision machinery, semiconductor, aerospace, atomic energy, medicine, and so on. However, different industries have different requirements for the cleanliness of clean rooms.
1. Clean room requirements for semiconductor and integrated circuit production
The purification of semiconductor materials is an important foundation for the development of semiconductor devices. Due to the process requirements of large-scale and ultra large-scale integrated circuits, in order to obtain high purity silicon materials, the high purity of raw materials and intermediate media, as well as the clean environment for high-precision constant temperature and humidity production, have become prominent issues affecting product quality.
The yield of an integrated circuit chip is related to the defect density of the chip, which in turn is related to the amount of particulate matter in the air. Therefore, with the rapid development of integrated circuits, not only the size of controllable particles in the air is highly required, but also the particle beam needs further control; At the same time, there are also relevant requirements for chemical pollution control in dust-free workshops in VLSI production environments.
2. Clean room requirements for the production of precision machinery and fine chemical products
With the development of science and technology, the production and processing of many industrial products have put forward extremely high requirements for the dust concentration in the dust-free workshop in the production environment, requiring the production environment to have a certain level of air cleanliness and the supply quality of various related substances required to control the production process. For example, in film production, if the film is contaminated by dust, emulsion oxidation, decreased activity, and pH changes can occur, which can affect the sensitivity of the film.
3. Requirements for clean rooms and dust-free workshops for the production of pharmaceutical products
Drugs are special commodities used to prevent and treat diseases, restore and adjust body functions. Their quality is directly related to human health and safety. If some drugs are contaminated or cross contaminated by microorganisms, dust particles, etc. during the production process, unexpected diseases and hazards may occur.
The grade standard for clean rooms is usually divided by the unique indicator of suspended particle concentration. Particle sensor is an instrument used to measure the quantity and particle size distribution of dust particles per unit volume in a clean room. It has the advantages of fast testing speed, large dynamic distribution width, and no human influence. It is the main monitoring instrument used by production enterprises and scientific research departments such as paint spraying and environmental protection products.
In precision machinery production workshops, the requirements for workshop cleanliness are very high. Particle sensors are essential equipment in almost every precision electronics workshop. If our workshop has such a particle concentration monitor, we can easily understand the dust situation in the workshop in the office, achieving an intelligent product experience.
For example, when we detect that the concentration of particulate matter in the workshop is too high, we can timely notify the relevant person in charge of the workshop and take necessary measures to reduce the concentration of particulate matter below the safety standard, which is very beneficial to the safe production of products and provide users with reliable and high-quality products. The UK alpha particle detector PM2.5 sensor dust sensor OPC-R2 is a small particle detector launched by alphasense after OPC-R1, which can detect PM1, PM2.5 and PM10. The equipment has higher flow rate and lower power consumption than OPC-N2 and OPC-N3. It is a product with high cost performance. British Alphasense PM2.5 sensor/atmospheric particle monitor OPC-N3 is an upgraded product of OPC-N2. Its appearance and size are the same as OPC-N2. Its range reaches 0.38-40um and can measure up to 2000 μ g/m3; The number of channels is expanded to 24, and the onboard temperature and humidity sensors are also provided; It can be applied to the monitoring of heavily polluted environment; In addition, Japan’s Figaro laser particle sensor PM2.5 sensor TF-LP01 is a small module that uses the scattering principle to detect dust particles in the air. It has the advantages of small size, high detection accuracy, good repeatability, good consistency, real-time response, continuous collection, strong anti-interference ability, ultra-quiet fan, 100% detection and calibration of the sensor after delivery, etc

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